JPH0648848Y2 - カセット二連式基板処理装置のカセット整列装置 - Google Patents

カセット二連式基板処理装置のカセット整列装置

Info

Publication number
JPH0648848Y2
JPH0648848Y2 JP1989092323U JP9232389U JPH0648848Y2 JP H0648848 Y2 JPH0648848 Y2 JP H0648848Y2 JP 1989092323 U JP1989092323 U JP 1989092323U JP 9232389 U JP9232389 U JP 9232389U JP H0648848 Y2 JPH0648848 Y2 JP H0648848Y2
Authority
JP
Japan
Prior art keywords
cassette
wafer
substrate processing
cassettes
dual
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989092323U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0332428U (en]
Inventor
俊作 児玉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP1989092323U priority Critical patent/JPH0648848Y2/ja
Publication of JPH0332428U publication Critical patent/JPH0332428U/ja
Application granted granted Critical
Publication of JPH0648848Y2 publication Critical patent/JPH0648848Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1989092323U 1989-08-04 1989-08-04 カセット二連式基板処理装置のカセット整列装置 Expired - Lifetime JPH0648848Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989092323U JPH0648848Y2 (ja) 1989-08-04 1989-08-04 カセット二連式基板処理装置のカセット整列装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989092323U JPH0648848Y2 (ja) 1989-08-04 1989-08-04 カセット二連式基板処理装置のカセット整列装置

Publications (2)

Publication Number Publication Date
JPH0332428U JPH0332428U (en]) 1991-03-29
JPH0648848Y2 true JPH0648848Y2 (ja) 1994-12-12

Family

ID=31641760

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989092323U Expired - Lifetime JPH0648848Y2 (ja) 1989-08-04 1989-08-04 カセット二連式基板処理装置のカセット整列装置

Country Status (1)

Country Link
JP (1) JPH0648848Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002051904A (ja) * 2000-08-10 2002-02-19 Nippon Kouatsu Electric Co 香 炉
JP4658308B2 (ja) * 2000-11-16 2011-03-23 日本高圧電気株式会社 香炉

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS596545A (ja) * 1982-07-05 1984-01-13 Hitachi Ltd ウエハ乾燥装置
JPS60163436A (ja) * 1984-02-06 1985-08-26 Seiichiro Sogo 半導体材料の洗浄乾燥方法

Also Published As

Publication number Publication date
JPH0332428U (en]) 1991-03-29

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